Objective High purity quartz serves as a strategically critical mineral resource for China's emerging industries, with its processed products extensively utilized in photovoltaic, electronic information, semiconductor and related high−tech sectors. Currently, China predominantly relies on imported supplies for 4N8−grade and above high purity quartz sand (SiO₂ purity ≥99.998%), creating an urgent need to enhance domestic prospecting evaluation and resource development of high−grade deposits. Micro−scale in situ analysis techniques enable rapid screening of potential high−purity quartz resources, thereby significantly improving the efficiency of resource assessment.

Methods Through systematic compilation of published literature and integration of previous research findings, this study summarizes current micro−scale in situ analytical techniques, while comprehensively evaluating their technological progress, methodological limitations and future development trends.

Results Three principal techniques demonstrate distinct characteristics: LA−ICP−MS provides low detection limits and multi−element capability but suffers from limited spatial resolution; EPMA offers high spatial resolution and non−destructive analysis yet has higher detection limits and is susceptible to various error factors; SIMS delivers exceptional sensitivity but is constrained by strong matrix effects and lacks standardized reference materials.

Conclusions While each technique exhibits unique advantages, integrated analytical approaches can significantly enhance impurity characterization accuracy. Future development should prioritize reference material development, detection limit optimization and analytical precision improvement to establish a comprehensive evaluation framework based on lattice impurity signatures.