Abstract: Abstract: Objective High-purity quartz is a critical strategic mineral resource in the development of emerging industries in the nation. Quartz products made from such high-purity material are extensively utilized across various sectors including photovoltaic (PV), electronic information, and semiconductor industries.Currently, China heavily relies on imports for high-purity quartz sand of 4N8 grade or higher (SiO₂ purity ≥ 99.998%), and there is an urgent need to identify suitable raw ore materials for the production of high-purity quartz. By studying in situ microanalytical techniques applicable to quartz, it is possible to conduct qualitative and quantitative analyses of trace elements within the quartz crystal lattice. Understanding the migration and enrichment mechanisms of impurities in quartz is of great significance for elucidating the genetic processes of high-purity quartz and for evaluating the potential of high-purity quartz resources. Methods Based on a review of published literature, this study summarizes the occurrence of lattice impurities in quartz and the factors influencing their content. It also outlines current in-situ microanalytical techniques used for quartz characterization. By integrating previous research on quartz microanalysis, this paper provides a comprehensive overview of the research progress, existing limitations, and future prospects of in-situ microanalytical methods for quartz. Results Currently, three in-situ microanalytical techniques are commonly used for quartz analysis: LA-ICP-MS, EPMA, and SIMS, each with distinct advantages and limitations. LA-ICP-MS offers low detection limits, high precision, and the ability to measure multiple trace elements simultaneously, but its spatial resolution is relatively low. EPMA provides high spatial resolution and non-destructive analysis, though it has higher detection limits and is susceptible to error sources such as secondary fluorescence, bremsstrahlung radiation, and beam-induced effects. SIMS features low detection limits and high sensitivity, but suffers from strong matrix effects and high operational costs. Moreover, a lack of widely accepted quartz reference materials limits its routine application. Conclusions In situ microanalytical techniques have great potential for development, but each has inherent limitations. Combining multiple methods can effectively improve the accuracy of trace element analysis. Further research on quartz microanalysis is needed to refine the evaluation system for high-purity quartz ore resources from the perspective of lattice impurities.